File:10000 EUV photon dose.png

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Description
English: Dose for 10,000 EUV photons within different diameters. An estimated 2000 photons would be expected in the outermost 10% of the feature width. The table displayed gives a more accurate estimate between the specified inner and outer diameters. According to the Poisson distribution, the standard deviation is the square root of the photon number expected value, or √2000≅45 photons. In a large population of features approaching the normal distribution, one out of a billion features would be more than six standard deviations away from the mean, i.e., 6*√2000/2000≈13%.
Date
Source Excel
Author Guiding light

Licensing

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Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
GNU head Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License.
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Original upload log

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The original description page was here. All following user names refer to en.wikipedia.
Date/Time Dimensions User Comment
2015-02-23 04:47 1048×637× (138518 bytes) Guiding light Removed redundant columns in table
2015-02-14 09:42 1127×683× (155196 bytes) Guiding light Changing CD range of shot noise table.
2015-02-14 09:27 991×598× (124797 bytes) Guiding light Different CD range
2015-02-14 05:22 1129×685× (153064 bytes) Guiding light change evaluation dose to 40 mJ/cm<sup>2</sup>.
2015-02-08 13:40 1023×621× (129200 bytes) Guiding light Eliminated redundant columns in table.
2015-02-08 03:12 1174×711× (171810 bytes) Guiding light Expanded diameter range for shot noise calculations.
2015-02-08 02:52 1108×668× (146266 bytes) Guiding light Added shot noise calculations of the # photons making up differences in diameters in ~20-30 nm range.
2014-12-26 05:49 539×322× (42676 bytes) Guiding light Added inset showing edge photon number sensitivity
2014-12-21 14:29 480×289× (9646 bytes) Guiding light Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]]

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Date/TimeThumbnailDimensionsUserComment
current00:24, 19 March 2015Thumbnail for version as of 00:24, 19 March 20151,048 × 637 (135 KB)OgreBot (talk | contribs)(BOT): Reverting to most recent version before archival
00:24, 19 March 2015Thumbnail for version as of 00:24, 19 March 20151,127 × 683 (152 KB)OgreBot (talk | contribs)(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-02-14 09:42:22 by Guiding light
00:24, 19 March 2015Thumbnail for version as of 00:24, 19 March 2015991 × 598 (122 KB)OgreBot (talk | contribs)(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-02-14 09:27:40 by Guiding light
00:24, 19 March 2015Thumbnail for version as of 00:24, 19 March 20151,129 × 685 (149 KB)OgreBot (talk | contribs)(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-02-14 05:22:21 by Guiding light
00:24, 19 March 2015Thumbnail for version as of 00:24, 19 March 20151,023 × 621 (126 KB)OgreBot (talk | contribs)(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-02-08 13:40:04 by Guiding light
00:24, 19 March 2015Thumbnail for version as of 00:24, 19 March 20151,174 × 711 (168 KB)OgreBot (talk | contribs)(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-02-08 03:12:36 by Guiding light
00:24, 19 March 2015Thumbnail for version as of 00:24, 19 March 20151,108 × 668 (143 KB)OgreBot (talk | contribs)(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-02-08 02:52:14 by Guiding light
00:24, 19 March 2015Thumbnail for version as of 00:24, 19 March 2015539 × 322 (42 KB)OgreBot (talk | contribs)(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2014-12-26 05:49:12 by Guiding light
00:24, 19 March 2015Thumbnail for version as of 00:24, 19 March 2015480 × 289 (9 KB)OgreBot (talk | contribs)(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2014-12-21 14:29:05 by Guiding light
07:38, 18 March 2015Thumbnail for version as of 07:38, 18 March 20151,048 × 637 (135 KB)Awksauce (talk | contribs)Transferred from en.wikipedia

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